We aim to develop more stable and efficient automation system and equipment and provide intelligent automation equipment solutions at semiconductor industry through the development of the human resources as well as the pursuit of core technologies.
We strive to make successful future with customers by concentrating on the development of new technologies such as logistics automation business and advanced industrial solutions under the basis of automation equipment technology.

We always declare differentiation from other competitors and provide future-oriented cleaning technology and products based on our long experience and technology in post wet & CMP cleaning area.
In addition, we also promise that we will always reach customer demands and do our best to be a business division that provides differentiated products and services by providing top-notch solutions in accordance with the reality that requires precision cleaning.

The semiconductor process requires an insulator film. Ozone gases, especially those used in the ALD process,
are oxidizing materials which are indispensable
when making insulator film.