AT DIVISION

The semiconductor industry's leading KoreaTechno Co.,Ltd.

SORTER
Wafer Sorter
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Model

KTSSP-300

KT FAB Sorter has designed for FAB enviroment, it support full automation KT FAB Sorter has designed for FAB enviroment, it support full automation and related FAB automation and SEMI Standard. Various wafer size, Carrier applicable.

Specification
Applications Wafer Handling & Sorting 25 Wafer align, wafer ID reading, Wafer data HOST Reporting
Wafer Size 8”(200mm), 12”(300mm)
Wafer Type Notch 12”, Flat & Notch 8”
Dimension 1,730(W) x 1,420(D) x 2,000(H)mm
Weight 800Kg±10%
Through put 25 Wafer Align, ID Reading 90 Sec Wafer Sorting 550 Wafers/Hr (Without ID Reading, HOST Communication)
Option BCR or RFID System
Wafer Dump
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Model

KTWDS-2302A

Wafer DUMP System minimizes particles and wafer contact in case of cassette exchange during process Wafer DUMP System minimizes particles and wafer contact in case of cassette exchange during process. This System has compact size to help convenience of trasfer and to minimize foot print. This System also preforms best preformances with low COO by using handling module which is for price competitiveness.

Specification
Applications Wafer Handling & Dumping
Wafer Size 8”(200mm) or 12”(300mm)
Wafer Type Notch or Flat Type
Dimension 980(W) x 1,400{D} x 1,400{H} (mm)
Weight Less than 150 Kg
Cassette Type 8” PP Cassette, 8” FOSB or 12”FOSB
Without Mapping Max 180Lot--1hr
Through put With Mapping Max 180Lot--1hr
End-Effector 25/Fixed or Transformable
Stage Mapping
Option BCR or RFID System
Laser Marking Sorter
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Model

KTLMS-3004B

KT Laser Marking Sorter System Developed for wafer marking on silicon wafer surface KT Laser Marking Sorter System Developed for wafer marking on silicon wafer surface, it shows high marking quality and accuracy perfomed. it support FAB Automation, SEMI Standard.

Specification
Applications Wafer handling, Sorter, ID reading And Serial or 2D making
Wafer Size 8”(200mm), 12”(300mm)
Wafer Type Notch or Flat Wafer
Dimension 1,800(W) x 2,500(D) x 2,256(H) (mm)
Weight 1000KgC
Cassette Type 8” Open CST(200mm) / 12”FOUP(300mm)
Throughput Without ID Reading 550 Wafer/hr
With ID Marking and reading 170 Wafers/Hr
Ring Sorter
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Model

KTRS-4002A

KT Ring Sorter System Developed for attached wafer with ring frame, it provide high performance of accuracy, safety KT Ring Sorter System Developed for attached wafer with ring frame, it provide high performance of accuracy, safety. Satisfied Design for SEMI Standard and FAB Automation.

Specification
Applications Wafer Sorting, Handling, ID Reading
Wafer Size 300mm + Ring Frame
Wafer Type Notch
Dimension 1,610(W) x 2,980(D) x 2,246(H)
Weight Less then 900Kg
Carrier 300mm Ring Frame Carrier
Through put 550 Sheets / Hr (No ID Reading), 250 Sheets / Hr (No ID Reading)
Cleenness ISO Class 10
FAB Automation OHT, SESC II, GEM 300

If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email

E-Mail : smlee@ktsemi.co.kr