AT DIVISION

The semiconductor industry's leading KoreaTechno Co.,Ltd.

FOUP Opener
300mm FOUP Opener
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Model

KTFO-3000

200mm & 300mm combined FOUP Opener FOUP Opener is a load port for FOUP with the automatic door open module. FOUP Opener is assembled with process equipments and helps to keep micro environment during process and transfer.

Specification
- Appliactions: Load / Unload 300mm FOUP
- FOUP Door Lock Vacuum suction (-50kPa Min, required)
- Fast open and close cycle time
- Wafer mapping
- BCR or RFID System
Complying with SEMI Standard
- Serial RS-232C (SECS I/II), D, I/O
- Easy integration (Centering kit & free standing)
- Wafer protrusion Sensing
- Pinch point protection
Bulk Etching System
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Model

SMIF Index(Embed Type)

Specification
  • - Available for 200mm Wafer or Mask Pod applications
  • - Available for SMIF Pod application
  • - Complying with SEMI standard
  • - Fast open / Close cycle time
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Model

Table POD opener(Stand alone Type)

Specification
  • - Serial RS-232C, SECS I/II, D, I/O.
  • - Easy integration
  • - Wafer protrusion sensing
  • - Available for SMIF Pod or Open cassette(Option)

If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email

E-Mail : smlee@ktsemi.co.kr