300mm FOUP Opener
Model
KTFO-3000
200mm & 300mm combined FOUP Opener FOUP Opener is a load port for FOUP with the automatic door open module. FOUP Opener is assembled with process equipments and helps to keep micro environment during process and transfer.
Specification
| - Appliactions: Load / Unload 300mm FOUP |
| - FOUP Door Lock Vacuum suction (-50kPa Min, required) |
| - Fast open and close cycle time |
| - Wafer mapping |
| - BCR or RFID System |
Complying with SEMI Standard
| - Serial RS-232C (SECS I/II), D, I/O |
| - Easy integration (Centering kit & free standing) |
| - Wafer protrusion Sensing |
| - Pinch point protection |
Bulk Etching System
Model
SMIF Index(Embed Type)
Specification
- - Available for 200mm Wafer or Mask Pod applications
- - Available for SMIF Pod application
- - Complying with SEMI standard
- - Fast open / Close cycle time
Model
Table POD opener(Stand alone Type)
Specification
- - Serial RS-232C, SECS I/II, D, I/O.
- - Easy integration
- - Wafer protrusion sensing
- - Available for SMIF Pod or Open cassette(Option)
If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email
E-Mail : smlee@ktsemi.co.kr