300mm EFEM System
Model
KTEF-3002A
EFEM system prevents particle generation and contamination during Loading / Unloading of wafer under micro environment EFEM system prevents particle generation and contamination during Loading / Unloading of wafer under micro environment.
Specification
| Wafer Size | 8”(200mm), 12”(300mm) |
|---|---|
| Dimension | 1,720(W) x 1,447(D) x 1,880(H)mm |
| Weight | Less than 700Kg |
| SEMI Standard Compliance | |
| Height of Loading Port | 900mm |
| Cleanliness | Class 1 @ 0.1um |
| Serial RS-232C, Parallel I/O Communication | |
| BCR or RFID System(Option) | |
Inspection EFEM System
Model
KTES-3001A
INSPECTION & EFEM Integrated equipment
Integrated EFEM & Vision System minimizes particels and wafer contamination during wafer transfer and process in 300mm(or 200mm) in Fab.
This integrated system enable user to minimizes foot print with low COO
Specification
| - Wafer size : 6"(150mm) or 8"(200mm) or 12"(300mm) |
| - Available for various Load Port Optimize vision space |
| - Custom design for user with united system controller |
If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email
E-Mail : smlee@ktsemi.co.kr