EFEM system prevents particle generation and contamination during Loading / Unloading of wafer under micro environment EFEM system prevents particle generation and contamination during Loading / Unloading of wafer under micro environment.
|Wafer Size||8”(200mm), 12”(300mm)|
|Dimension||1,720(W) x 1,447(D) x 1,880(H)mm|
|Weight||Less than 700Kg|
|SEMI Standard Compliance|
|Height of Loading Port||900mm|
|Cleanliness||Class 1 @ 0.1um|
|Serial RS-232C, Parallel I/O Communication|
|BCR or RFID System(Option)|
INSPECTION & EFEM Integrated equipment
Integrated EFEM & Vision System minimizes particels and wafer contamination during wafer transfer and process in 300mm(or 200mm) in Fab.
This integrated system enable user to minimizes foot print with low COO
|- Wafer size : 6"(150mm) or 8"(200mm) or 12"(300mm)|
|- Available for various Load Port Optimize vision space|
|- Custom design for user with united system controller|
If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email