AT DIVISION

The semiconductor industry's leading KoreaTechno Co.,Ltd.

EFEM System
300mm EFEM System
Model

KTEF-3002A

EFEM system prevents particle generation and contamination during Loading / Unloading of wafer under micro environment EFEM system prevents particle generation and contamination during Loading / Unloading of wafer under micro environment.

Specification
Wafer Size 8”(200mm), 12”(300mm)
Dimension 1,720(W) x 1,447(D) x 1,880(H)mm
Weight Less than 700Kg
SEMI Standard Compliance
Height of Loading Port 900mm
Cleanliness Class 1 @ 0.1um
Serial RS-232C, Parallel I/O Communication
BCR or RFID System(Option)
Inspection EFEM System
Model

KTES-3001A

INSPECTION & EFEM Integrated equipment Integrated EFEM & Vision System minimizes particels and wafer contamination during wafer transfer and process in 300mm(or 200mm) in Fab.
This integrated system enable user to minimizes foot print with low COO

Specification
- Wafer size : 6"(150mm) or 8"(200mm) or 12"(300mm)
- Available for various Load Port Optimize vision space
- Custom design for user with united system controller

If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email

E-Mail : smlee@ktsemi.co.kr