Model
BJKO17A-OHT
Auto Jar Packing System consist of 200, 300mm cassette-only load port and unload port for wafer jar boxes, wafer in the cassette can be packed or unpacked into a wafer jar box by the transfer robot.
And wafers are normally packed into a jar box with clean sheets.
Specification
| Applications | Wafer jar box packing and unpacking |
|---|---|
| applied wafer size | 8" (200mm) 12" (300mm) |
| Weight | 3,800kg |
| Cassette Type | Open CST(P.P. Monsanto, Metal) FOUP, Auto FOSB |
| Throughput | 100 Wafers / Hr |
| Options | FAB Automation, BCR, OCR |
If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email
E-Mail : smlee@ktsemi.co.kr