Auto Jar Packing System consist of 200, 300mm cassette-only load port and unload port for wafer jar boxes, wafer in the cassette can be packed or unpacked into a wafer jar box by the transfer robot.
And wafers are normally packed into a jar box with clean sheets.
|Applications||Wafer jar box packing and unpacking|
|applied wafer size||8" (200mm) 12" (300mm)|
|Cassette Type||Open CST(P.P. Monsanto, Metal) FOUP, Auto FOSB|
|Throughput||100 Wafers / Hr|
|Options||FAB Automation, BCR, OCR|
If you want to pruchase and have any questions please feel free to contact +82-31-781-0033 or email